Concurrent x-ray diffractometer for high throughput structural diagnosis of epitaxial thin films
نویسندگان
چکیده
منابع مشابه
Structural investigation of CoMnGe combinatorial epitaxial thin films using microfocused synchrotron X-ray
We discuss important experimental considerations and high-throughput synchrotron-based techniques for structural characterization of binary and ternary composition-spread thin films. We apply these techniques to obtain detailed structural phase diagrams of CoMnGe ternary alloy system. # 2003 Elsevier B.V. All rights reserved. PACS: 61.10.Nz; 07.85.Qe; 68.55.Jk
متن کاملMicrostructural Characterization of Thin Films and Surfaces by a New Grazing Incident X-ray Diffractometer
Modern devices require the production and characterization of state-of-the-art-ultra-thin films under 10-nanometers thick. Examples can be found in integrated circuits, magnetic pickup heads and high effi-ciency solid state lasers. In “thin films” with thickness greater than 10 nanometers, the crystallographic properties (crystalline quality, orientation relationship between films and substrate...
متن کاملNano-structural Characterization of Post-annealed ZnO Thin Films by X-ray Diffraction and Field Emission Scanning Electron Microscopy
ZnO thin films were deposited on Si(400) substrates by e-beam evaporation technique, and then post-annealed at different annealing temperatures (200-800°C). Dependence of the crystallographic structure, nano-strain, chemical composition and surface physical Morphology of these layers on annealing temperature were studied. The crystallographic structure of films was studied using X-Ray Diffracti...
متن کاملNano-structural Characterization of Post-annealed ZnO Thin Films by X-ray Diffraction and Field Emission Scanning Electron Microscopy
ZnO thin films were deposited on Si(400) substrates by e-beam evaporation technique, and then post-annealed at different annealing temperatures (200-800°C). Dependence of the crystallographic structure, nano-strain, chemical composition and surface physical Morphology of these layers on annealing temperature were studied. The crystallographic structure of films was studied using X-Ray Diffracti...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2001
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.1415402